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Analysis of nonlinear phenomena in a thermal micro-actuator with a built-in thermal position sensor
- Bazaei, Ali, Zhu, Yong, Moheimani, Reza, Yuce, Mehmet Rasit
Bidirectional electrothermal actuator with Z-shaped beams
- Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit
A 2-DOF MEMS ultrasonic energy harvester
Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing
- Zhu, Yong, Bazaei, Ali, Moheimani, S. O. Reza, Yuce, Mehmet Rasit
A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Ji, Lujun, Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet Rasit
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